Fig. 3From: Characteristics of diamond turned NiP smoothed with ion beam planarization techniqueSurface roughness (RMS 0.70 nm) after repeating 5 times of IBP processes on sample A. The surface roughness of NiP is found to decrease exponentially. The numbers in parentheses are the surface roughness (RMS) values after spin-coating but before ion beam etching in each step. The numbers outside the parentheses are roughness after each IBP (i.e. after ion beam etching) step. N/A indicates the unavailable caseBack to article page