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Table 1 Properties of samples after diamond turning (see Ref. [7]). For the investigations presented here only samples A and D have been used

From: Characteristics of diamond turned NiP smoothed with ion beam planarization technique

Sample

Spatial wavelength

Depth of turning marks

Surface roughness

A

1.5 μm

20 nm

6.49 nm

B

6 μm

60 nm

19.91 nm

C

3.5 μm

20 nm

7.63 nm

D

6 μm

20 nm

6.51 nm

E

6 μm

10 nm

4.99 nm

F

25 μm

60 nm

16.4 nm