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Table 2 Simulative conditions and results

From: Modelling and simulation of mid-spatial-frequency error generation in CCOS

No. TIF diameter mm Path type Path spacing mm RMSr nm PSDc nm2·mm
1 20 raster 4 1.707 69.12
2 20 circle 3 1.273 2.5
3 20 random 2 0.958 1.19
4 15 raster 3 1.713 62.77
5 15 circle 2 1.665 1.08
6 15 random 4 15.09 13.5
7 10 raster 2 1.845 69.54
8 10 circle 4 17.265 1700.3
9 10 random 3 30.5 14.2
k1 1.31 1.76 11.35 RMSr as the evaluation index
k2 6.16 6.73 11.16
k3 16.54 15.52 1.49
Range 15.22 8.78 9.86
p1 24.27 67.14 594.31 PSDc as the evaluation index
p2 25.78 567.96 26.49
p3 594.68 9.63 23.94
Range 570.41 558.33 570.37