Table 2 Simulative conditions and results
From: Modelling and simulation of mid-spatial-frequency error generation in CCOS
No. | TIF diameter mm | Path type | Path spacing mm | RMSr nm | PSDc nm2·mm |
|---|---|---|---|---|---|
1 | 20 | raster | 4 | 1.707 | 69.12 |
2 | 20 | circle | 3 | 1.273 | 2.5 |
3 | 20 | random | 2 | 0.958 | 1.19 |
4 | 15 | raster | 3 | 1.713 | 62.77 |
5 | 15 | circle | 2 | 1.665 | 1.08 |
6 | 15 | random | 4 | 15.09 | 13.5 |
7 | 10 | raster | 2 | 1.845 | 69.54 |
8 | 10 | circle | 4 | 17.265 | 1700.3 |
9 | 10 | random | 3 | 30.5 | 14.2 |
k1 | 1.31 | 1.76 | 11.35 | RMSr as the evaluation index | |
k2 | 6.16 | 6.73 | 11.16 | ||
k3 | 16.54 | 15.52 | 1.49 | ||
Range | 15.22 | 8.78 | 9.86 | ||
p1 | 24.27 | 67.14 | 594.31 | PSDc as the evaluation index | |
p2 | 25.78 | 567.96 | 26.49 | ||
p3 | 594.68 | 9.63 | 23.94 | ||
Range | 570.41 | 558.33 | 570.37 | ||