TY - JOUR AU - Kino, G. S. AU - Chim, S. S. C. PY - 1990 DA - 1990// TI - Mirau correlation microscope JO - Appl. Opt VL - 29 UR - https://doi.org/10.1364/AO.29.003775 DO - 10.1364/AO.29.003775 ID - Kino1990 ER - TY - JOUR AU - Lee, B. S. AU - Strand, T. C. PY - 1990 DA - 1990// TI - Profilometry with a coherence scanning microscope JO - Appl. Opt VL - 29 UR - https://doi.org/10.1364/AO.29.003784 DO - 10.1364/AO.29.003784 ID - Lee1990 ER - TY - JOUR AU - Caber, P. J. PY - 1993 DA - 1993// TI - Interferometric profiler for rough surfaces JO - Appl. Opt VL - 32 UR - https://doi.org/10.1364/AO.32.003438 DO - 10.1364/AO.32.003438 ID - Caber1993 ER - TY - STD TI - Malacara, D.: Optical Shop Testing. Wiley, Hoboken, New Jersey, USA (2007) ID - ref4 ER - TY - JOUR AU - Groot, P. PY - 2015 DA - 2015// TI - Principles of interference microscopy for the measurement of surface topography JO - Adv. Opt. Photon VL - 7 UR - https://doi.org/10.1364/AOP.7.000001 DO - 10.1364/AOP.7.000001 ID - Groot2015 ER - TY - JOUR AU - Groot, P. AU - Lega, X. C. PY - 2005 DA - 2005// TI - Interpreting interferometric height measurements using the instrument transfer function JO - Proc. Fringe VL - 2005 ID - Groot2005 ER - TY - JOUR AU - Tolmon, F. R. AU - Wood, J. G. PY - 1956 DA - 1956// TI - Fringe spacing in interference microscopes JO - J. Scientific Instruments VL - 33 UR - https://doi.org/10.1088/0950-7671/33/6/310 DO - 10.1088/0950-7671/33/6/310 ID - Tolmon1956 ER - TY - JOUR AU - Biegen, J. F. PY - 1989 DA - 1989// TI - Calibration requirements for Mirau and Linnik microscope interferometers JO - Appl. Opt VL - 28 UR - https://doi.org/10.1364/AO.28.001972 DO - 10.1364/AO.28.001972 ID - Biegen1989 ER - TY - JOUR AU - Creath, K. PY - 1989 DA - 1989// TI - Calibration of numerical aperture effects in interferometric microscope objectives JO - Appl. Opt VL - 28 UR - https://doi.org/10.1364/AO.28.003333 DO - 10.1364/AO.28.003333 ID - Creath1989 ER - TY - JOUR AU - Sheppard, C. J. R. AU - Larkin, K. G. PY - 1995 DA - 1995// TI - Effect of numerical aperture on interference fringe spacing JO - Appl. Opt VL - 34 UR - https://doi.org/10.1364/AO.34.004731 DO - 10.1364/AO.34.004731 ID - Sheppard1995 ER - TY - JOUR AU - Köhler, A. PY - 1893 DA - 1893// TI - Ein neues Beleuchtungsverfahren für mikrophotographische Zwecke JO - Zeitschrift für wissenschaftliche Mikroskopie und für Mikroskopische Technik VL - 10 ID - Köhler1893 ER - TY - JOUR AU - Abbe, E. PY - 1873 DA - 1873// TI - Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung JO - Archiv für mikroskopische Anatomie VL - 9 UR - https://doi.org/10.1007/BF02956173 DO - 10.1007/BF02956173 ID - Abbe1873 ER - TY - JOUR AU - Lehmann, P. AU - Xie, W. PY - 2015 DA - 2015// TI - Signal formation in depth-scanning 3D interference microscopy at high numerical apertures JO - SPIE Proc. VL - 9660 UR - https://doi.org/10.1117/12.2197635 DO - 10.1117/12.2197635 ID - Lehmann2015 ER - TY - JOUR AU - Xie, W. AU - Lehmann, P. AU - Niehues, J. AU - Tereschenko, S. PY - 2016 DA - 2016// TI - Signal modeling in low coherence interference microscopy on example of rectangular grating JO - Opt. Exp. VL - 24 UR - https://doi.org/10.1364/OE.24.014283 DO - 10.1364/OE.24.014283 ID - Xie2016 ER - TY - JOUR AU - Lehmann, P. AU - Xie, W. AU - Allendorf, B. AU - Tereschenko, S. PY - 2018 DA - 2018// TI - Coherence scanning and phase imaging optical interference microscopy at the lateral resolution limit JO - Opt. Exp. VL - 26 UR - https://doi.org/10.1364/OE.26.007376 DO - 10.1364/OE.26.007376 ID - Lehmann2018 ER - TY - JOUR AU - Abdulhalim, I. PY - 2012 DA - 2012// TI - Spatial and temporal coherence effects in interference microscopy and full-field optical coherence tomography JO - Ann. Phys. VL - 525 UR - https://doi.org/10.1002/andp.201200106 DO - 10.1002/andp.201200106 ID - Abdulhalim2012 ER - TY - JOUR AU - Buchta, Z. AU - Mikel, B. AU - Lazar, J. AU - Cip, O. PY - 2011 DA - 2011// TI - White-light fringe detection based on a novel light source and colour CCD camera JO - Meas. Sci. Technol VL - 22 UR - https://doi.org/10.1088/0957-0233/22/9/094031 DO - 10.1088/0957-0233/22/9/094031 ID - Buchta2011 ER - TY - STD TI - Homepage Supracon AG. http://www.supracon.com/en/nanoscale_linewidth_pitch_standard.html. Accessed 20 Mar 2019 UR - http://www.supracon.com/en/nanoscale_linewidth_pitch_standard.html ID - ref18 ER - TY - STD TI - Homepage Simetrics GmbH. http://www.simetrics.de/en/produkte.html. Accessed 20 Mar 2019 UR - http://www.simetrics.de/en/produkte.html ID - ref19 ER - TY - JOUR AU - Fleischer, M. AU - Windecker, R. AU - Tiziani, H. J. PY - 2000 DA - 2000// TI - Fast algorithms for data reduction in modern optical three-dimensional profile measurement systems with MMX technology JO - Appl. Opt. VL - 39 UR - https://doi.org/10.1364/AO.39.001290 DO - 10.1364/AO.39.001290 ID - Fleischer2000 ER - TY - STD TI - Tereschenko, S.: Digitale Analyse periodischer und transienter Messsignale anhand von Beispielen aus der optischen Präzisionsmesstechnik, PhD Thesis. University of Kassel, Kassel (2018) ID - ref21 ER - TY - JOUR AU - Harasaki, A. AU - Wyant, J. C. PY - 2000 DA - 2000// TI - Fringe modulation skewing effect in white-light vertical scanning interferometry JO - Appl. Opt. VL - 39 UR - https://doi.org/10.1364/AO.39.002101 DO - 10.1364/AO.39.002101 ID - Harasaki2000 ER - TY - JOUR AU - Xie, W. AU - Lehmann, P. AU - Niehues, J. PY - 2012 DA - 2012// TI - Lateral resolution and transfer characteristics of vertical scanning white-light interferometers JO - Appl. Opt. VL - 51 UR - https://doi.org/10.1364/AO.51.001795 DO - 10.1364/AO.51.001795 ID - Xie2012 ER -