Fig. 4From: Spectral composition of low-coherence interferograms at high numerical aperturesResults of a 0.4 μm pitch calibration standard measured with the Mirau interferometer (a) to (c) topography plots, (d) to (f) horizontal surface profiles using phase analysis assuming 460 nm wavelength (a) and (d), 550 nm (b) and (e), and 600 nm (c) and (f)Back to article page