Fig. 5From: Spectral composition of low-coherence interferograms at high numerical aperturesResults of a 0.3 μm pitch calibration standard measured with the Linnik interferometer (a) to (c) topography plots, (d) to (f) horizontal surface profiles using phase analysis assuming 460 nm wavelength (a) and (d), 600 nm (b) and (e), and 800 nm (c) and (f)Back to article page