Fig. 2

Measured shape deviations of the plane calibration mirror based on a) calibration assuming a plane display surface and b) using a polynomial display model of 7th order whose coefficients are determined during calibration. Both calibrations and shape evaluations were performed on the same phase measurement data. Measured shape deviation is reduced from a) PV = 1.65 μm, RMS = 210 nm to b) PV = 0.55 μm, RMS = 124 nm by application of the polynomial display model