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Fig. 1 | Journal of the European Optical Society-Rapid Publications

Fig. 1

From: Design and performance analysis of integrated focusing grating couplers for the transverse-magnetic TM00 mode in a photonic BiCMOS technology

Fig. 1

Example of a photonic BiCMOS platform in cross-section. Electronics (e.g. heterojunction bipolar transistors, HBT) in bulk-Si depicted on the right hand side are integrated in parallel with silicon-on-insulator (SOI) photonic components in the frontend of line (FEOL). Both are covered by a complex backend of line (BEOL) stack, here represented in a simplified form

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