Table 1 Mean loss and 3σ variation of a wire TM FGCs with a period of 940 nm, an etch depth of 70 nm and varying slot widths. The results are averaged over 61 chips on the same wafer
Slot width | Wavelength | Mean loss | 3σ deviation |
|---|---|---|---|
425 nm | 1565 nm | −4.3 dB | ± 0.2 dB |
470 nm | 1550 nm | −4.1 dB | ± 0.3 dB |
520 nm | 1535 nm | − 4.2 dB | ± 0.3 dB |