Fig. 10From: Improvement of the optical properties after surface error correction of aluminium mirror surfacesInvestigations on ion beam planarization and O2 finishing of Al905. The evolution of (a) PSD spectra, (b) reflectivity in the visible wavelength range and c) local chemical composition via ToF-SIMS of the initial surface, after two runs ion beam planarization with N2 and subsequent O2 finishing at beam voltages of 0.6 keV and 1.5 keV, respectively, are shownBack to article page