Fig. 6From: Improvement of the optical properties after surface error correction of aluminium mirror surfacesa PSD function of the untreated Al905 surface, after RIBE machining with nitrogen and RIBE finishing with oxygen after different number of repetitions at 1.5 keV beam energy with corresponding AFM measurements (z-scale in nm) with 3 μm × 3 μm scan sizes shown in (b)Back to article page