Fig. 9
From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces
ToF-SIMS depth profiles of RSA Al905 after RIBE machining with nitrogen and after subsequent oxygen finishing with 1x, 3x and 20x repetitions at 1.5 keV beam energy. The extent of a nitride surface layer is represented by the AlN− - signal (top), the surface oxide layer is represented by the AlO2− - signal (middle) and the carbon is represented by the C− - signal (bottom)