Table 1 Ion beam process parameters of RIBE investigations on Al905 aluminium disc samples
From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces
Process mode | Operating gas | Beam energy [eV] | Process pressure [Pa] | FWHM [mm] | Beam current [mA] | Etch depth [nm] | Scanning repetitions |
|---|---|---|---|---|---|---|---|
RIBE1 | N2 | 1500 | 8.0 × 10− 4 | 7.1 | 4.30 | 49 | 1 |
N2 | 1500 | 8.0 × 10−4 | 7.2 | 4.54 | 196 | 4 | |
N2 | 1500 | 8.0 × 10−4 | 7.1 | 4.36 | 492 | 10 | |
N2 | 1500 | 8.0 × 10−4 | 7.2 | 4.34 | 1006 | 20 | |
N2 | 1500 | 8.0 × 10−4 | 7.2 | 4.40 | 1998 | 40 | |
RIBE2 | N2 | 1500 | 8.0 × 10− 4 | 7.1 | 4.32 | 905 | 20 |
O2 | 1500 | 1.1 × 10− 3 | 5.9 | 1.67 | – | 1 | |
O2 | 1500 | 1.1 × 10−3 | 6.1 | 1.72 | 18 | 3 | |
O2 | 1500 | 1.2 × 10−3 | 5.6 | 1.63 | 65 | 10 | |
O2 | 1500 | 1.1 × 10−3 | 6.0 | 1.70 | 123 | 20 | |
RIBE planarization | N2 | 1200 | 1.6 × 10−3 | 8.4 | 1.89 | 9 | |
RIBE finishing | O2 | 1500 | 1.3 × 10−3 | 4.3 | 1.68 | 1 | |
600 | 8.5 × 10−4 | 6.5 | 1.15 | 4 |