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Table 2 Surface roughness of aluminium Al905 divided into microroughness, waviness/roughness and full range roughness. The roughness values are calculated for each machining depth in the spatial frequency ranges of 0.0024 μm− 1 – 1.7 μm− 1 for waviness/roughness and 1.7 μm− 1 - 34.7 μm− 1 for microroughness

From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces

RSA Al905 Machining depth [nm] Microroughness [nm rms] Roughness + waviness [nm rms] Full range
[nm rms]
Untreated   3.8 ± 1.2 9.5 ± 1.7 10.2 ± 2.3
RIBE N2 49 4.3 ± 0.8 9.6 ± 1.5 10.6 ± 1.7
196 4.1 ± 0.4 8.5 ± 1.2 9.6 ± 1.2
  492 4.2 ± 0.5 9.3 ± 1.3 10.2 ± 1.4
  1006 4.4 ± 0.7 9.8 ± 0.8 10.9 ± 2.0
  1998 4.2 ± 0.5 12.2 ± 0.7 12.9 ± 1.8