From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces
RSA Al905 | Machining depth [nm] | Microroughness [nm rms] | Roughness + waviness [nm rms] | Full range [nm rms] |
---|---|---|---|---|
Untreated | 3.8 ± 1.2 | 9.5 ± 1.7 | 10.2 ± 2.3 | |
RIBE N2 | 49 | 4.3 ± 0.8 | 9.6 ± 1.5 | 10.6 ± 1.7 |
196 | 4.1 ± 0.4 | 8.5 ± 1.2 | 9.6 ± 1.2 | |
492 | 4.2 ± 0.5 | 9.3 ± 1.3 | 10.2 ± 1.4 | |
1006 | 4.4 ± 0.7 | 9.8 ± 0.8 | 10.9 ± 2.0 | |
1998 | 4.2 ± 0.5 | 12.2 ± 0.7 | 12.9 ± 1.8 |