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Table 2 Surface roughness of aluminium Al905 divided into microroughness, waviness/roughness and full range roughness. The roughness values are calculated for each machining depth in the spatial frequency ranges of 0.0024 μm− 1 – 1.7 μm− 1 for waviness/roughness and 1.7 μm− 1 - 34.7 μm− 1 for microroughness

From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces

RSA Al905

Machining depth [nm]

Microroughness [nm rms]

Roughness + waviness [nm rms]

Full range

[nm rms]

Untreated

 

3.8 ± 1.2

9.5 ± 1.7

10.2 ± 2.3

RIBE N2

49

4.3 ± 0.8

9.6 ± 1.5

10.6 ± 1.7

196

4.1 ± 0.4

8.5 ± 1.2

9.6 ± 1.2

 

492

4.2 ± 0.5

9.3 ± 1.3

10.2 ± 1.4

 

1006

4.4 ± 0.7

9.8 ± 0.8

10.9 ± 2.0

 

1998

4.2 ± 0.5

12.2 ± 0.7

12.9 ± 1.8