Table 3 Surface roughness in the microroughness regime of the untreated aluminium Al905 surface, after RIBE machining with N2 and subsequently O2 gas at 1.5 keV beam energy
From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces
RSA Al905 | Repetitions | Machining depth [nm] | Microroughness [nm rms] |
|---|---|---|---|
Untreated | – | 3.4 ± 0.8 | |
RIBE N2 | 20 | 905 | 4.5 ± 0.7 |
RIBE O2 | 1 | – | 3.4 ± 0.5 |
3 | 18 | 3.1 ± 0.3 | |
10 | 65 | 3.3 ± 0.5 | |
20 | 123 | 3.5 ± 0.9 |