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Table 3 Surface roughness in the microroughness regime of the untreated aluminium Al905 surface, after RIBE machining with N2 and subsequently O2 gas at 1.5 keV beam energy

From: Improvement of the optical properties after surface error correction of aluminium mirror surfaces

RSA Al905 Repetitions Machining depth [nm] Microroughness [nm rms]
Untreated   3.4 ± 0.8
RIBE N2 20 905 4.5 ± 0.7
RIBE O2 1 3.4 ± 0.5
  3 18 3.1 ± 0.3
  10 65 3.3 ± 0.5
  20 123 3.5 ± 0.9