Fig. 2From: A predictable smoothing evolution model for computer-controlled polishingThe double planetary motion of the polishing pad, where R is the radius of the polishing pad. The polishing pad has a revolution ω1 around a certain circle O at a certain eccentricity e, and a rotation with angular velocity ω2. The distance between the polishing point A and the center O is r. Since the polishing pad motion has both revolution and rotation, with the corresponding linear velocities being v1 and v2, respectively, the velocity v of the polishing pad relative to the workpiece is the vector sum of v1 and v2. The angle between v1 and v2 is β. The angle between O, A and O′ is αBack to article page