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Fig. 2 | Journal of the European Optical Society-Rapid Publications

Fig. 2

From: A predictable smoothing evolution model for computer-controlled polishing

Fig. 2

The double planetary motion of the polishing pad, where R is the radius of the polishing pad. The polishing pad has a revolution ω1 around a certain circle O at a certain eccentricity e, and a rotation with angular velocity ω2. The distance between the polishing point A and the center O is r. Since the polishing pad motion has both revolution and rotation, with the corresponding linear velocities being v1 and v2, respectively, the velocity v of the polishing pad relative to the workpiece is the vector sum of v1 and v2. The angle between v1 and v2 is β. The angle between O, A and O′ is α

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