Fig. 5From: Crystallization behavior of ion beam sputtered HfO2 thin films and its effect on the laser-induced damage thresholdDamage probability curves for N = 5000 pulses as a function of the pulse energies for the different specimens. b The 5% LIDT as a function of the number of pulses (according to Jensen et al. [27]) for the amorphous, intermediate, and crystalline sample. The dashed lines are spline fits to guide the eyesBack to article page