Fig. 1

Schematic of the wire-grid structure. This structure comprises metal and electron-beam (EB) resist layer on the SiO₂ substrate. Parameters p and w are the structural period and the width of metal on the resist layer, respectively. w/p is the duty ratio of the periodical structure. The parameter h is the thickness of the EB resist layer. The details of these values are shown in Table 1. The wavelength λ is between 450 and 375 nm. The incident angle θ is between 0^o and 50^o