Table 1 Simulation and fabrication conditions of the wire-grid structures
Wavelength λ (nm) | 450 | 375 | ||
|---|---|---|---|---|
Metal | Ag | Al | Ag | Al |
Period p (nm) | 350 | 350 | 350 | 350 |
Width of resist w (nm) | 262.5 | 122.5 | 182.0 | 287.0 |
Duty ratio w/p | 0.75 | 0.35 | 0.52 | 0.82 |
Thickness of resist h (nm) | 100 | 100 | 100 | 100 |
Thickness of metal t (nm) | 80 | 80 | 100 | 100 |