Table 2 Parameters A, B, C and D and layer thickness d for fitting Ti layer using the four-parameter model (equation 1) for three different SiO2 thicknesses (300, 500 and 800 nm)
SiO2 thickness | A | B (μm−1) | C | D (μm) | d (nm) |
|---|---|---|---|---|---|
300 | 0.546 | 3.52 | 4.05 | -0.654 | 28.5 |
500 | 0.897 | 2.99 | 3.98 | -0.685 | 28.9 |
800 | 0.779 | 3.41 | 4.13 | -0.650 | 27.2 |