Fig. 2From: Characteristics of diamond turned NiP smoothed with ion beam planarization techniqueSurface roughness (1.29 nm) after repeating 3 times of IBP processes on sample D. The surface roughness of NiP is found to decrease exponentially. The numbers in parentheses are the surface roughness (RMS) values after spin-coating but prior to ion beam etching in each step. The numbers outside the parentheses are roughness after each IBP (i.e. after ion beam etching) stepBack to article page