Table 1 Level of each factor in orthogonal simulation experiment
From: Modelling and simulation of mid-spatial-frequency error generation in CCOS
Factor | TIF diameter mm | Path type | Path spacing mm | |
|---|---|---|---|---|
Level | 1 | 20 | raster | 4 |
2 | 15 | circle | 3 | |
3 | 10 | random | 2 | |
From: Modelling and simulation of mid-spatial-frequency error generation in CCOS
Factor | TIF diameter mm | Path type | Path spacing mm | |
|---|---|---|---|---|
Level | 1 | 20 | raster | 4 |
2 | 15 | circle | 3 | |
3 | 10 | random | 2 | |