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Table 3 Experimental conditions and results

From: Modelling and simulation of mid-spatial-frequency error generation in CCOS

No. TIF diameter
mm
Path type Path spacing
mm
RMSr
nm
PSDc
nm2·mm
1 20 raster 4 7.838 1384
2 20 circle 3 3.285 53.43
3 20 random 2 3.23 4.68
4 15 raster 3 13.858 5570
5 15 circle 2 3.274 10.24
6 15 random 4 18.152 14.89
7 10 raster 2 7.199 913
8 10 circle 4 25.513 8311
9 10 random 3 25.718 1955
k1 4.78 9.63 17.17 RMSr as the evaluation index
k2 11.76 10.69 14.29
k3 19.48 15.70 4.57
Range 14.69 5.01 12.60
p1 480.70 2622.33 3236.63 PSDc as the evaluation index
p2 1865.04 2791.56 2526.14
p3 3726.33 658.19 309.31
Range 3245.63 2133.37 2927.32