Table 3 Experimental conditions and results
From: Modelling and simulation of mid-spatial-frequency error generation in CCOS
No. | TIF diameter mm | Path type | Path spacing mm | RMSr nm | PSDc nm2·mm |
|---|---|---|---|---|---|
1 | 20 | raster | 4 | 7.838 | 1384 |
2 | 20 | circle | 3 | 3.285 | 53.43 |
3 | 20 | random | 2 | 3.23 | 4.68 |
4 | 15 | raster | 3 | 13.858 | 5570 |
5 | 15 | circle | 2 | 3.274 | 10.24 |
6 | 15 | random | 4 | 18.152 | 14.89 |
7 | 10 | raster | 2 | 7.199 | 913 |
8 | 10 | circle | 4 | 25.513 | 8311 |
9 | 10 | random | 3 | 25.718 | 1955 |
k1 | 4.78 | 9.63 | 17.17 | RMSr as the evaluation index | |
k2 | 11.76 | 10.69 | 14.29 | ||
k3 | 19.48 | 15.70 | 4.57 | ||
Range | 14.69 | 5.01 | 12.60 | ||
p1 | 480.70 | 2622.33 | 3236.63 | PSDc as the evaluation index | |
p2 | 1865.04 | 2791.56 | 2526.14 | ||
p3 | 3726.33 | 658.19 | 309.31 | ||
Range | 3245.63 | 2133.37 | 2927.32 | ||