From: Nano-imprinted subwavelength gratings as polarizing beamsplitters
Etching depth h
ηTE,0
ηTE,1
ηTE,3
ηTM,0
ηTM,1
ηTM,3
700 nm
57.7%
0.3%
0.1%
27.6%
3.3%
310 nm
0.8%
25.5%
3.1%
38.5%
10.1%
1.2%