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Table 2 RCWA-simulated diffraction efficiencies

From: Nano-imprinted subwavelength gratings as polarizing beamsplitters

Etching depth h

ηTE,0

ηTE,1

ηTE,3

ηTM,0

ηTM,1

ηTM,3

700 nm

57.7%

0.3%

0.1%

0.1%

27.6%

3.3%

310 nm

0.8%

25.5%

3.1%

38.5%

10.1%

1.2%